TNS Paper Preparation
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Pilar Studies
Method : The residual is obtained after two selections:
- 1st, a selection of 1mm wide on Y axis for the long pillars and both on X and Y axis for the "dot" pillars patterns
- 2nd, a set of three different selections on the amplitude with the following numbers : all positive amplitudes, from 0 to 10000, from 10000 to 20000.
- The localization of these pillars is made by looking at the y-beam vs x-measure 2D histogram where we can identify in-homogeneity as being the true position of the pillars.
Results: We observe for a high spacing patterns a difference of (~10um max, ~5um min) between the residuals including pillars and the ones excluding pillars. A trend is observed at high amplitude where the residual is improved in both cases, in fact corresponding to wider clusters.
The difference between two plots from the same zigzag pattern and excluding pillars is explained by the poor quality of the selection.
Note: it would be possible to use the residual excluding pillars obtained from one pattern as a reference for the other patterns, allowing to "allign" all residuals. The effect being small, using this method won't change a lot the results.